Metal Impurities in Silicon- and Germanium-Based Technologies
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"Metal Impurities in Silicon- and Germanium-Based Technologies" by Cor Claeys, Eddy Simoen is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
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"Metal Impurities in Silicon- and Germanium-Based Technologies" by Cor Claeys, Eddy Simoen is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
Topic: Devices & Sensors
Author: Cor Claeys, Eddy Simoen
Who this is for:
- Physics students
- Science-minded readers
- Readers building technical understanding
Why this book matters: It provides structured coverage of physics concepts in a way that supports deeper understanding and continued study.
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
| Author | Cor Claeys, Eddy Simoen |
| Publisher | Springer |
| Published | 2018-08-22 |
| ISBN-13 | 9783319939247 |
| Binding | Hardcover |
| Language | English |
| Subjects | Technology & Engineering |
| Topic | Devices & Sensors |
| Series | Springer Materials Science |
Format: Hardcover
Language: English
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