Spectroscopic Ellipsometry
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"Spectroscopic Ellipsometry" by Hiroyuki Fujiwara is a book focused on Light & Optics. Best for readers interested in this subject.
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
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"Spectroscopic Ellipsometry" by Hiroyuki Fujiwara is a book focused on Light & Optics. Best for readers interested in this subject.
Topic: Light & Optics
Author: Hiroyuki Fujiwara
Who this is for:
- Students
- Educators
- Interested readers
Why this book matters: It offers useful subject matter and structured coverage for readers looking to explore the topic in more depth.
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
| Author | Hiroyuki Fujiwara |
| Publisher | Wiley |
| Published | 2007-03-12 |
| ISBN-13 | 9780470016084 |
| Binding | Hardcover |
| Pages | 392 |
| Language | English |
| Subjects | Technology & Engineering |
| Topic | Light & Optics |
Format: Hardcover
Length: 392 pages
Language: English
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