Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
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"Physical Design and Mask Synthesis for Directed Self-Assembly Lithography" by Seongbo Shim, Youngsoo Shin is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
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"Physical Design and Mask Synthesis for Directed Self-Assembly Lithography" by Seongbo Shim, Youngsoo Shin is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
Topic: Devices & Sensors
Author: Seongbo Shim, Youngsoo Shin
Who this is for:
- Physics students
- Science-minded readers
- Readers building technical understanding
Why this book matters: It provides structured coverage of physics concepts in a way that supports deeper understanding and continued study.
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
| Author | Seongbo Shim, Youngsoo Shin |
| Publisher | Springer |
| Published | 2019-02-08 |
| ISBN-13 | 9783030094553 |
| Binding | Paperback |
| Pages | 138 |
| Language | English |
| Subjects | Technology & Engineering |
| Topic | Devices & Sensors |
| Series | Nanoscience and Technology |
Format: Paperback
Length: 138 pages
Language: English
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