Handbook of Advanced Plasma Processing Techniques
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"Handbook of Advanced Plasma Processing Techniques" by R.J. Shul is a astronomy book and space science reference focused on Cosmology. Best for students, researchers, and serious astronomy enthusiasts.
This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.
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"Handbook of Advanced Plasma Processing Techniques" by R.J. Shul is a astronomy book and space science reference focused on Cosmology. Best for students, researchers, and serious astronomy enthusiasts.
Topic: Cosmology
Author: R.J. Shul
Who this is for:
- Astronomy students
- Researchers and advanced hobbyists
- Readers exploring space science topics
Why this book matters: It matters because it helps readers build a stronger understanding of astronomy concepts, observations, and scientific ideas related to space.
This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.
| Author | R.J. Shul |
| Publisher | Springer Science & Business Media |
| Published | 2000-08-28 |
| ISBN-13 | 9783540667728 |
| Binding | Hardcover |
| Pages | 664 |
| Language | English |
| Subjects | Science |
| Topic | Cosmology |
Format: Hardcover
Length: 664 pages
Language: English
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