Glow Discharge Processes
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"Glow Discharge Processes" by Brian Chapman is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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"Glow Discharge Processes" by Brian Chapman is a physics book focused on Devices & Sensors. Best for students, educators, and scientifically curious readers.
Topic: Devices & Sensors
Author: Brian Chapman
Who this is for:
- Physics students
- Science-minded readers
- Readers building technical understanding
Why this book matters: It provides structured coverage of physics concepts in a way that supports deeper understanding and continued study.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
| Author | Brian Chapman |
| Publisher | Wiley-Interscience |
| Published | 1980 |
| ISBN-13 | 9780471078289 |
| Binding | Hardcover |
| Pages | 432 |
| Language | English |
| Subjects | Science |
| Topic | Devices & Sensors |
Format: Hardcover
Length: 432 pages
Language: English
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