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Fundamental Electron Interactions with Plasma Processing Gases (2004)

Fundamental Electron Interactions with Plasma Processing Gases

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"Fundamental Electron Interactions with Plasma Processing Gases" by Loucas G. Christophorou, James K. Olthoff is a astronomy book and space science reference focused on Cosmology. Best for students, researchers, and serious astronomy enthusiasts.

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

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Best For: Researchers and professionals in physics and chemistry focusing on electron interactions and plasma processing.
Focus: Fundamental interactions of low-energy electrons with molecules relevant to plasma processing gases.
Covers: Recent advances in electron-molecule interaction processes and their applications in modern technology, especially the semiconductor industry.
Why It Matters: Understanding these interactions is essential for advancements in plasma processing and semiconductor manufacturing technologies.

"Fundamental Electron Interactions with Plasma Processing Gases" by Loucas G. Christophorou, James K. Olthoff is a astronomy book and space science reference focused on Cosmology. Best for students, researchers, and serious astronomy enthusiasts.

Topic: Cosmology

Author: Loucas G. Christophorou, James K. Olthoff

Who this is for:

  • Astronomy students
  • Researchers and advanced hobbyists
  • Readers exploring space science topics

Why this book matters: It matters because it helps readers build a stronger understanding of astronomy concepts, observations, and scientific ideas related to space.

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

AuthorLoucas G. Christophorou, James K. Olthoff
PublisherSpringer Science & Business Media
Published2004
ISBN-139780306480379
BindingHardcover
Pages806
LanguageEnglish
SubjectsScience
TopicCosmology
SeriesPhysics of Atoms and Molecules

Format: Hardcover

Length: 806 pages

Language: English

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