Flash Lamp Annealing
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"Flash Lamp Annealing" by Lars Rebohle, Slawomir Prucnal, Denise Reichel is a book focused on Devices & Sensors. Best for readers interested in this subject.
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
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"Flash Lamp Annealing" by Lars Rebohle, Slawomir Prucnal, Denise Reichel is a book focused on Devices & Sensors. Best for readers interested in this subject.
Topic: Devices & Sensors
Author: Lars Rebohle, Slawomir Prucnal, Denise Reichel
Who this is for:
- Students
- Educators
- Interested readers
Why this book matters: It offers useful subject matter and structured coverage for readers looking to explore the topic in more depth.
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
| Author | Lars Rebohle, Slawomir Prucnal, Denise Reichel |
| Publisher | Springer |
| Published | 2020-08-14 |
| ISBN-13 | 9783030233013 |
| Binding | Paperback |
| Pages | 288 |
| Language | English |
| Subjects | Technology & Engineering |
| Topic | Devices & Sensors |
| Series | Springer Materials Science |
Format: Paperback
Length: 288 pages
Language: English
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