Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
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"Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals" by Oleg Velichko is a mathematics book and learning resource focused on Devices & Sensors. Best for teachers, students, and readers looking for stronger mathematical understanding.
Comprehensive theory describing atomic diffusion in silicon crystals under strong nonequilibrium conditions caused by ion implantation and interaction with surface or interfaces is formulated in this book. A set of generalized equations that describe diffusion of impurity atoms and point defects has the form suitable for numerical solution. Based on this theory, partial diffusion models are constructed, and simulation of many doping processes used in microelectronics is carried out.
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"Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals" by Oleg Velichko is a mathematics book and learning resource focused on Devices & Sensors. Best for teachers, students, and readers looking for stronger mathematical understanding.
Topic: Devices & Sensors
Author: Oleg Velichko
Who this is for:
- Teachers and classroom instructors
- Students building subject mastery
- Readers looking for practical learning support
Why this book matters: It stands out as a practical math resource that helps explain concepts, strengthen problem-solving, and support classroom or independent learning.
Comprehensive theory describing atomic diffusion in silicon crystals under strong nonequilibrium conditions caused by ion implantation and interaction with surface or interfaces is formulated in this book. A set of generalized equations that describe diffusion of impurity atoms and point defects has the form suitable for numerical solution. Based on this theory, partial diffusion models are constructed, and simulation of many doping processes used in microelectronics is carried out.
| Author | Oleg Velichko |
| Publisher | Wspc (Europe) |
| Published | 2019 |
| ISBN-13 | 9781786347152 |
| Binding | Hardcover |
| Language | English |
| Subjects | Semiconductors |
| Topic | Devices & Sensors |
Format: Hardcover
Language: English
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